INNAN TAKEHARU,印南 岳晴,SHIMAMOTO TOKUYOSHI,嶋本 篤義,FUJIWARA MASATO,藤原 真人,NISHIMURA JUNICHI,西村 淳一
申请号：
JP2012185856
公开号：
JP2014044271A
申请日:
2012.08.24
申请国别(地区):
JP
年份:
2014
代理人:
摘要：
PROBLEM TO BE SOLVED: To provide an optical scanning observation apparatus capable of stable scanning by a resonance frequency by quickly suppressing the influence of undesired overlapping and distortion of a scanning line, with a simple configuration.SOLUTION: In an optical scanning observation apparatus 10 two-dimensionally scanning light from a light source section 30 on an object to be observed 100 through an optical fiber 11, to detect detection light by a detection section 40, the exit end of the optical fiber 11 is vibrated in a first axial direction by current near the resonance frequency of a drive current generation section 50 by a scanning section 21 and vibrated in a second axial direction by current including two frequency components including a frequency near the resonance frequency and a non-resonance frequency. The current having the frequency near the resonance frequency in the second axial direction has a previously set phase difference with respect to the current near the resonance frequency in the first axial direction and reduces the vibration near the resonance frequency in the second axial direction, caused by the vibration drive in the first axial direction.COPYRIGHT: (C)2014,JPO&INPIT【課題】簡単な構成で、走査線の不所望な重複や歪みの影響を素早く抑制し、共振周波数による安定した走査が可能な光走査型観察装置を提供する。【解決手段】光源部30からの光を、光ファイバ11を介して被観察物100上で二次元走査し、検出光を検出部40で検出する光走査型観察装置10において、光ファイバ11の出口端部は、走査部21により、駆動電流生成部50の共振周波数近傍の電流により第一軸方向に振動駆動され、共振周波数近傍の周波数と非共振周波数とを含む二つの周波数成分を有する電流により、第二軸方向に振動駆動される。第二軸方向の共振周波数近傍の周波数の電流は、第一軸方向の共振周波数近傍の電流に対し予め定められた位相差を有し、第一軸方向の振動駆動により生じる、第二軸方向の共振周波数近傍の振動を低減する。【選択図】図1
