A flexible micro-electrode and manufacture method thereof. First, a graphene electrode layer is grown on a temporary substrate. Then, the temporary substrate is removed after growing a patterned soft substrate to form an electrode body including the graphene electrode and the soft substrate. Subsequently, an outer surface of the electrode body is covered with a insulation layer such that an organism electrode end of the electrode body is exposed to contact with a living body to perform signal measurement. The present invention has characteristic of high electrical conductivity, high biocompatibility and low signal noise by using the graphene electrode layer. Besides, the soft substrate could provide the excellent flexibility, increasing the adhesion between the organism electrode end and skin, and also avoids the problem of inflammation of bio-tissue.一種用於神經訊號偵測之可撓性微電極及其製作方法,其係於一暫時基板上成長一石墨烯電極層,接著成長一圖案化的軟性基板,而後去除該暫時基板僅留下一包括該石墨烯電極層以及該軟性基板的電極體,並利用一絕緣層包覆於電極體之外表面,並露出該生物電極端以與生物體接觸進行訊號量測。本發明利用石墨烯電極層而具有高導電性、高生物相容性以及低雜訊之特點,並透過軟性基板而達到可撓之特性,增加該生物電極端與皮膚的貼附性,且降低穿刺皮膚時可能造成生物組織發炎的問題。20...石墨烯電極層40...軟性基板41...第一端42...第二端50...絕緣層60...電極體61...生物電極端62...介面連接端
