PROBLEM TO BE SOLVED: To provide a three-dimensional probe improved in structure so that images in many directions can be obtained without changing direction.SOLUTION: The three-dimensional probe includes: a drive unit for generating power in a forward/backward direction a power transmission unit for transmitting power in connection with the drive unit a probing unit for receiving the power transmission from the power transmission unit and moved to a plurality of locations so as to perform an operation a location detector for detecting the mobile location of the probing unit so as to allow the probing unit to move to a plurality of locations and to perform an operation. The probing unit has a structure to move to a plurality of locations so as to perform an operation. In the meantime, The location of the probing unit is determined by detecting the mobile location of the probing unit by using the location detector, and through the determination, the operation of the probing unit is controlled in response to the mobile location of the probing unit. Thus, probing in many directions is performed from one location without changing direction.COPYRIGHT: (C)2011,JPO&INPIT【課題】3次元プローブに関する発明を提供する。【解決手段】本発明の3次元プローブは、正逆方向に動力を発生させる駆動部と、駆動部に連動して動力を伝達する動力伝達部と、動力伝達部から動力の伝達を受け、複数の位置に可動して動作する探触部と、探触部が複数の位置に可動して動作するように探触部の可動位置を感知する位置感知部とを備える。本発明によれば、探触部が複数の位置に可動して動作することができる構造をとる。その一方、位置感知部を用いて、探触部の可動位置を感知して探触部の位置を決定し、これを通じて探触部の動作を探触部の可動位置に応じて制御することにより、プローブ方向を変更することなしに、1つの位置から複数方向の探査を行うことができる。【選択図】図2
