ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
发明人:
BAEK, NAM SEOB,백남섭,KIM, YONG HEE,김용희,JUNG, SANG DON,정상돈,HWAN, YOUNG HWAN,한영환,CHUNG, MYUNG AE,정명애
申请号：
KR1020110132059
公开号：
KR1020130065272A
申请日:
2011.12.09
申请国别(地区):
KR
年份:
2013
代理人:
摘要：
PURPOSE: A method for forming micro patterns of a neuronal signal measurement chip is provided to form the micro pattern with a desired shape and size without using a photo initiator, by forming the micro patterns of the neuronal signal measurement chip by using a photo cross linking polymer.CONSTITUTION: A substrate (10) is prepared, and surface treatment is performed with 70W plasma under Ar/N2 atmosphere for 10 minutes to form OH functional group. A bio-affinity polymer (12) of 50% is diluted to 2% density with ethanol, and the substrate where the OH functional group is formed is put into the diluted solution for 12 hours at room temperature for chemical bonding. The substrate which is chemically bonded to the bio-affinity polymer is cleaned with ethanol and is thermally-treated at 120°C for 10 minutes and then is cleaned with ultrasonic waves for 5 minutes to remove the bio-affinity polymer not bonded to the surface of the substrate. The cleaned substrate is cleaned with ethanol again and is dried with nitrogen.COPYRIGHT KIPO 2013본 발명은 신경신호 측정용 칩의 미세패턴 형성방법에 관한 것이다. 고분자의 광 가교를 유도하여 전극 표면에 광 패턴을 형성하고, 장기간 동안 세포성장을 유지할 수 있는 신경신호 측정용 칩의 미세패턴 형성방법을 제공하는데 있다.광 가교형 고분자를 이용하여 신경신호 측정용 칩의 미세패턴을 형성함으로써, 광 개시제의 사용 없이 원하는 모양과 크기로 미세패턴 형성이 가능하며, 공정을 단순화할 수 있어 다중극 전극 어레이 및 다양한 종류의 기판에서 미세패턴을 제공할 수 있다.
