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Bolometer and method of manufacturing the same
专利权人:
Peter Dirksen
发明人:
Peter Dirksen,Sjoerd Hesdahl
申请号:
US13633475
公开号:
US08890076B2
申请日:
2012.10.02
申请国别(地区):
US
年份:
2014
代理人:
摘要:
The present invention relates to a bolometer (10) comprising a substrate (12), a first membrane (16) formed by removing a first sacrificial layer (14) on the substrate (12), the first membrane (16) comprising a measuring element (18) for measuring an amount of incident electromagnetic radiation (R), a second membrane (22) formed by removing a second sacrificial layer (20) on the first membrane (16), the second membrane (22) enclosing the first membrane (16), a first cavity (24) formed between the substrate (12) and the first membrane (16), and a second cavity (26) formed between the first membrane (16) and the second membrane (22). The present invention further relates to a method of manufacturing a bolometer, as well as a thermographic image sensor and medical device.
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