A method is provided of tissue ablation during a tissue ablation procedure. Ablation energy is applied by using a tissue ablation device to create an ablation at a tissue site. An ablation endpoint at the tissue site is detected by using an ablation endpoint device with one or more sensors that are positioned to monitor the ablation. The one or more sensors are selected from at least one of, a piezoelectric and a silicon MEMS sensor. Upon detecting the ablation endpoint, delivery of ablation energy to the tissue site ceases.
