Provided are a silicone wound dressing, a method of manufacturing thereof and a method of using thereof. The silicone wound dressing has a silicone dressing base material and an amorphous carbon coating formed on the silicone dressing base material. The amorphous carbon coating is formed by subjecting the silicone dressing base material to a plasma polymerization in a plasma device under an atmosphere of a mixed gas comprising a hydrocarbon gas and an oxygen-containing gas. The silicone wound dressing has excellent oxygen permeability and is less likely to adhere to the wound. The speedy recovery of the wound is promoted by covering the wound with the silicone wound dressing.