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Confocal imaging using astigmatism
专利权人:
Inc.;Align Technology
发明人:
Erez Lampert,Isaia Glaser-Inbari
申请号:
US13684096
公开号:
US09717402B2
申请日:
2012.11.21
申请国别(地区):
US
年份:
2017
代理人:
摘要:
The present disclosure provides computing device implemented methods, apparatuses, and computing device readable media for confocal imaging using astigmatism. Confocal imaging can include receiving an image of a portion of an object captured by a confocal imaging device having a particular astigmatic character, determining an image pattern associated with the image, and determining a distance between a focus plane of the confocal imaging device and the portion of the object based, at least in part, on information regarding the image pattern. Confocal imaging can also include receiving data representing an image pattern associated with an image of an object captured by a confocal imaging device having a particular astigmatic character and having an image sensor with a plurality of pixels, and determining a positional relationship between the object and a focus plane of the confocal imaging device based on a distribution of the diffraction pattern over a portion of the plurality of pixels.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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