研磨液の性状測定装置

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专利权人:

株式会社荏原製作所;国立大学法人九州工業大学

发明人:

松尾 尚典,望月 宣宏,鈴木 恵友,深川 博信,木村 景一,カチョーンルンルアン パナート

申请号：

JP20130049687

公开号：

JP6115939(B2)

申请日:

2013.03.12

申请国别(地区):

日本

年份:

2017

代理人:

摘要：

PROBLEM TO BE SOLVED: To provide a property measuring device for a polishing liquid capable of stably and directly measuring the property of the polishing liquid existing on an abrasive pad.SOLUTION: A property measuring device for a polishing liquid includes: a polishing liquid storage mechanism 6 for storing a polishing liquid by damming the polishing liquid on an abrasive pad 2; and a sensor 7 for measuring the property of the polishing liquid stored in the polishing liquid storage mechanism 6. The sensor 7 is capable of directly measuring pH or ORP (oxidation reduction potential) of the polishing liquid so as to be used for controlling polishing conditions, such as a condition of supplying the polishing liquid.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/