PROBLEM TO BE SOLVED: To obtain a barrier membrane being an ultrathin mesh plate which can be mass produced at a low cost by preventing the ultrathin plate from biting into arrows due to simultaneous punching of plural micropores.SOLUTION: A punching and manufacturing method of a mesh plate used for the regeneration treatment with a barrier membrane comprises the steps of: positioning to a die 9 an ultrathin plate 8 being a workpiece which is manufactured by a press machine 1 having a punch 6 with at least plural arrows 7 and the die 9 lowering the punch 6 applying ultrasonic vibration 5a to at least one of the punch 6 and the die 9 with an ultrasonic oscillation mechanism 10 simultaneously punching plural holes 8a to the ultrathin plate 8 by bringing the plural arrows 7 into contact with the ultrathin plate 8 and pressing the plural arrows 7 against the ultrathin plate 8 and making the prulal arrows 7 pass through the ultrathin plate 8, and simultaneously punches the plural holes 8a while applying the ultrasonic vibration 5a to at least one of the punch 6 and the die 9.
