LOW VOLTAGE, LOW POWER MEMS TRANSDUCER WITH DIRECT INTERCONNECT CAPABILITY

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专利权人:

EXO IMAGING INC.

发明人:

Yusuf Haque,Sandeep Akkaraju,Janusz Bryzek

申请号：

US15826614

公开号：

US20180153510A1

申请日:

2017.11.29

申请国别(地区):

US

年份:

2018

代理人:

摘要：

A transceiver includes an array of pMUT elements, where each pMUT element includes: a substrate； a membrane suspending from the substrate； a bottom electrode disposed on the membrane； a piezoelectric layer disposed on the bottom electrode； and a first electrode disposed on the piezoelectric layer. Each pMUT element exhibits one or more modes of vibration.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/