PROBLEM TO BE SOLVED: To provide a chemical solution volatilizing vessel which can effectively volatilize chemical solution outside.SOLUTION: The chemical solution volatilizing vessel includes: an outer vessel having an opening to store the chemical solution a gas permeable sheet 113 covering the opening and a diffusion member 112 disposed inside the outer vessel along the gas permeable sheet to diffuse the chemical solution in a plane direction.COPYRIGHT: (C)2013,JPO&INPIT【課題】効果的に薬液を外部に揮散させることができる薬液揮散容器を提供する。【解決手段】薬液揮散容器は、開口を有し、薬液が収容される外容器と、前記開口を覆うガス透過性シート113と、前記ガス透過性シートに沿って、前記外容器の内部側に配置され、前記薬液を面方向に拡散する拡散部材112とを備えている。【選択図】図5
