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ELECTRON BEAM IRRADIATING DEVICE
专利权人:
HITACHI ZOSEN CORPORATION
发明人:
Hiroyuki DAIKU,Ichiro SAKAI,Norihiro INOUE,Yohei TERASAKA
申请号:
US16348340
公开号:
US20190287693A1
申请日:
2017.11.02
申请国别(地区):
US
年份:
2019
代理人:
摘要:
Provided is an electron beam irradiating device capable of emitting an electron beam from an electron beam generation source surrounded by a vacuum chamber to outside of the vacuum chamber through an electron beam exit window. The electron beam exit window includes: a grid; a window foil allowing the electron beam to pass therethrough; and a frame-shaped pressing member pressing the window foil against the grid. The surface of the grid has a groove section having an annular shape. A metal gasket is pressed between the groove section and the window foil.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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