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IMAGE CAPTURING DEVICE AND INSPECTION APPARATUS AND INSPECTION METHOD
专利权人:
NuFlare Technology, Inc.
发明人:
OGAWA Riki
申请号:
US201816034872
公开号:
US2018335394(A1)
申请日:
2018.07.13
申请国别(地区):
美国
年份:
2018
代理人:
摘要:
An image capturing device comprising, a light source configured to emit light having a predetermined wavelength, a polarization beamsplitter configured to receive the light from the light source, a Faraday rotator configured to rotate a polarization plane of the light via the polarization beamsplitter by changing the intensity of the magnetic field, an objective lens configured to illuminate an inspection target with the light transmitted through the Faraday rotator and a sensor configured to capture an optical image of the inspection target by causing the light reflected by the inspection target to be incident through the objective lens, the Faraday rotator, and the polarization beamsplitter.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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