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ULTRASONIC SENSOR
专利权人:
KYOCERA Corporation
发明人:
Hiroki OKADA
申请号:
US16487875
公开号:
US20200055088A1
申请日:
2018.02.14
申请国别(地区):
US
年份:
2020
代理人:
摘要:
A sensor includes a lower electrode layer facing a cavity, a piezoelectric layer located on the lower electrode layer, and an upper electrode layer located on the piezoelectric layer. The piezoelectric layer includes a first piezoelectric part and a second piezoelectric part. The first piezoelectric part includes a first material having piezoelectricity and at least partially overlays the cavity when viewed on a plane. The second piezoelectric part includes a second material having piezoelectricity and being different in at least one of a “g” constant and “d” constant from the first material and, when viewed on a plane, is located in a region different from an arrangement region of the first piezoelectric part and at least partially overlays the cavity.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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