Федеральное государственное бюджетное учреждение науки Институт физики прочности и материаловедения Сибирского отделения Российской академии наук (ИФПМ СО РАН) (RU)
发明人:
Псахье Сергей Григорьевич (RU),Михайлов Михаил Николаевич (RU),Легостаев Виктор Никифорович (RU),Ремнев Геннадий Ефимович (RU),Лотков Александр Иванович (RU),Смолянский Егор Александрович (RU),Мейснер
申请号：
RU2013123618/15
公开号：
RU2013123618A
申请日:
2013.05.23
申请国别(地区):
RU
年份:
2014
代理人:
摘要：
1. Installation ion-plasma processing of articles, comprising a working chamber with a source of ions (implanter), wherein the working chamber has three zones: two reversible and middle active lock chamber a gate valve vacuum system, the system heating and cooling the working and lock chambers, pneumatic system, the control system and power supply system, characterized in that one (setting) comprises Workpiece positioning system consisting of a mechanism moving the operating table which can be moved along the guides of the working and airlock a carriage with wire operated displacement, the engagement mechanism and a mechanism carriage disengaging from the work table, wherein the cable drive movement consists of a drum for winding a cable guide blocks shaft on which drum is mounted by tightening clamps in a position providing the least deviation branch cable when rewinding , wherein the drum shaft is mounted in two radial-spherical bearings arranged outside the vacuum zone, with reversible electromechanical actuator providing reciprocating translational th movement of the working table on which are arranged a plurality of vertical spindles with sprockets interconnected by a closed chain, and one of the spindles at the lower side of the working table is equipped with a sprocket or gear wheel which, when the table movement rolling on fixed on the basis of the working chamber the rail on which the connection or respectively the rack and rotates spindles vertical section, a fitting holes, which are easily removable establish the leashes to which We establish1. Установка ионно-плазменной обработки изделий, содержащая рабочую камеру с источником ионов (имплантером), причем рабочая камера имеет три зоны: две реверсивные и посередине активную шлюзовую камеру вакуумный затвор систему вакуумирования, систему прогрева и охлаждения рабочей и шлюзовых камер, пневмосистему, систему управления и систему электропитания, отличающаяся тем, что она (установка) содержит систему позицио
