A method of sterilizing an article such as a flexible endoscope is performedin a sterilizationchamber. A vacuum is applied in the sterilization chamber while the article iscontained in thesterilization chamber. A sterilant is then introduced into the sterilizationchamber. The pressurewithin the sterilization chamber is incrementally increased to provide a step-wise transition froma high vacuum state to atmospheric pressure. The article is therebysterilized.