Mold structures, and method of transfer of fine structures

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专利权人:

Masahiko Ogino

发明人:

Masahiko Ogino,Akihiro Miyauchi,Sigehisa Motowaki,Kosuke Kuwabara

申请号：

US13526708

公开号：

US08632714B2

申请日:

2012.06.19

申请国别(地区):

US

年份:

2014

代理人:

摘要：

A mold and a pattern transfer method using the same for a nanoprinting technology. The mold can be released from a substrate accurately and easily. The mold, which is used for forming a fine pattern on a substrate using a press machine, comprises a release mechanism.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/