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SYSTEMS AND METHODS FOR CAPTURE, STORAGE, AND SUPPLYING PHOSPHINE GAS
专利权人:
Entegris; Inc.
发明人:
McManus, James V.,Sturm, Edward A.,Baum, Thomas H.,Carruthers, J. Donald,Sweeney, Joshua B.
申请号:
AU2016269557
公开号:
AU2016269557A1
申请日:
2016.12.09
申请国别(地区):
AU
年份:
2017
代理人:
摘要:
#$%^&*AU2016269557A120170105.pdf#####ABSTRACT A system and process for generating and packaging phosphine gas, in which the process includes: reacting water and aluminum phosphide to generate phosphine, and providing the phosphine in a gas mixture at a phosphine concentration below a lower explosive limit adsorptively removing phosphine from the gas mixture and packaging the removed phosphine in a fluid storage and dispensing vessel.0) ~ 1/5 0 LUJ mq 000 LUO (1 LU L~LO cOL0 CL040 0 0 CNJ~C(4 -VC cc, ------------ ..... -I F----
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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