PROBLEM TO BE SOLVED: To accurately control the flow rate of liquid by suppressing a periodical change of the flow rate from a regulated predetermined flow rate and to rapidly, simply and easily execute a flushing operation of the liquid and a recovering operation after flushing.SOLUTION: A flow rate regulator 1A comprises a tube (soft member) 2, a channel bottom member 3 and an operating member 6. The member 3 is disposed in the tube 2, and a control groove 5 for gradually changing its cross- sectional area is formed along the longitudinal direction of the member 3 at one side end of the member 3. The member 6 has a tube support 61, a pair of walls 62, 63, and a pressing part 64. When the pair of walls 62, 63 are pressed in an approaching direction, the part 64 eliminates or relaxes pressure closing of the tube 2. When pressing of the pair of walls 62, 63 are eliminated, the pair of walls 62, 63 are elastically reset to an original state, and the tube 2 is again pressure closed.COPYRIGHT: (C)2002,JPO【課題】調節された所定の流量から流量が経時的に変化することを抑制し、流体の高精度な流量制御を行うことができるとともに、流体のフラッシュ操作、フラッシュ後の復帰操作を迅速、簡単かつ容易に行う。【解決手段】流量調節器1Aは、チューブ(軟質部材)2と流路底部材3と作動部材6とを有する。チューブ2内には流路底部材3が配置され、流路底部材3の一側面に、流路底部材3の長手方向に沿って横断面積が徐々に変化する制御溝5が形成されている。作動部材6は、チューブ支持部61と一対の壁部62、63と押圧部64を有する。一対の壁部62、63を接近する方向へ押圧すると押圧部64がチューブ2の圧閉を解除または緩和し、一対の壁部62、63の押圧を解除すると一対の壁部62、63が元の状態に弾性復帰し、チューブ2が再び圧閉される。
