PROBLEM TO BE SOLVED: To enable elimination of fixed pattern noise even if intensity of interference light fluctuates halfway through a measurement.SOLUTION: An imaging device has: optical branching means that branches light emitted form a light source into reference light and measurement light interference signal detection means that acquires an interference signal from interference light to be obtained by interfering return light to be obtained by irradiating an inspected object with the measurement light with the reference light noise signal acquisition means that acquires a noise signal including a noise component included in the interference light correction means that corrects intensity of one of the interference signal and the noise signal and noise removal means that uses one of the interference signal and the noise signal having the intensity corrected to remove the noise component included in the interference signal.SELECTED DRAWING: Figure 1COPYRIGHT: (C)2016,JPO&INPIT【課題】測定途中に干渉光の強度が変動しても、固定パターンノイズを除去することを可能とする。【解決手段】撮像装置において、光源から出射された光を参照光と測定光とに分岐する光分岐手段と、測定光を被検査物に照射することにより得られる戻り光と参照光とを干渉させて得られる干渉光より干渉信号を取得する干渉信号検出手段と、干渉光に含まれるノイズ成分を含むノイズ信号を取得するノイズ信号取得手段と、干渉信号とノイズ信号との一方の強度を補正する補正手段と、一方が補正された干渉信号とノイズ信号とを用いて、干渉信号に含まれるノイズ成分を除去するノイズ除去手段と、を配する。【選択図】図1
