WATSON, GREGORY, A.,HUMMEL, ROBERT, M.,JACOFSKY, MARC, C.,JACOFSKY, DAVID, J.
申请号:
EP12831536
公开号:
EP2755716A4
申请日:
2012.09.14
申请国别(地区):
EP
年份:
2015
代理人:
摘要:
A cold plasma high voltage power supply, comprising a capacitor charging power supply having one or more command inputs and an output; a capacitor bank having one or more capacitors, the capacitor bank being coupled to the output of the capacitor charging power supply; a controllable switch having an input port, and output port and a control port, the controllable switch coupled to the capacitor bank; a double tuned RF transformer having an input and an output, the input coupled to the output port of the controllable switch, and the double tuned RF transformer configured to resonate at a first frequency and at a second frequency; and a controller configured to provide commands to the one or more command inputs of the capacitor charging power supply, and to provide a trigger pulse to the control port of the controllable switch.