Wang Cheng,Nien Li-Wei,Hsueh Chun-Hway,Ho Hsin-Chia,Lai Yi-Chen
申请号：
US201715716518
公开号：
US2018106721(A1)
申请日:
2017.09.27
申请国别(地区):
美国
年份:
2018
代理人:
摘要：
A plasmonic sensor includes at least a substrate and a thin film metallic glass formed on the substrate. The dielectric constant (εr) of the thin film metallic glass is negative. Since the thin film metallic glass with negative εr is used in the plasmonic sensor, the material cost can be significantly reduced, the mechanical property can be improved, and the optoelectronic property can be increased. Since the thin film metallic glass is a kind of supercooled alloy with amorphous structure, it can be applied for imprinting deformation and amorphous without grain boundary scattering.
