John J. Ellis-Monaghan,Jeffrey P. Gambino,Mark D. Jaffe,Kirk D. Peterson,Jed H. Rankin
申请号：
US16216321
公开号：
US10712498B2
申请日:
2018.12.11
申请国别(地区):
US
年份:
2020
代理人:
摘要：
Methods and structures for shielding optical waveguides are provided. A method includes forming a first optical waveguide core and forming a second optical waveguide core adjacent to the first optical waveguide core. The method also includes forming an insulator layer over the first optical waveguide core and the second optical waveguide core. The method further includes forming a shielding structure in the insulator layer between the first optical waveguide core and the second optical waveguide core.
