活性種発生ユニットおよびこれを用いた活性種発生装置

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专利权人:

パナソニックIPマネジメント株式会社

发明人:

稲垣 純,田中 史子,大友 みゆき,加藤 亮,中原 健吾,上田 哲也

申请号：

JP2011256234

公开号：

JP6043944B2

申请日:

2011.11.24

申请国别(地区):

JP

年份:

2016

代理人:

摘要：

An active species emission unit comprises: a case unit having either a cylindrical or box shape, further comprising an aperture unit on one end thereof a discharge electrode, a leading end whereof is inserted via the aperture unit into the case unit and a semiconductor electric unit which is positioned vertically facing the discharge electrode in the vicinity of the leading end thereof. A power source connection unit which serves as a ground potential is positioned on the exterior periphery of the semiconductor electric unit. Voltage is applied from a power source unit to the power source connection unit and the discharge electrode and an active species emitted by a corona discharge.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/