PROBLEM TO BE SOLVED: To provide a variable shape mirror with a mounting substrate (third substrate) that minimizes deformation of a bonded section.SOLUTION: A mounting substrate (third substrate) 300 is disposed opposite a mirror substrate (second substrate) 200 having relatively larger projected area, and the mirror substrate 200 and the mounting substrate 300 are bonded together in an area in which an actuator substrate 100 and the mirror substrate 200 do not overlap in a plane (XY-plane) parallel to a plane of a reflective member 202.SELECTED DRAWING: Figure 3COPYRIGHT: (C)2016,JPO&INPIT【課題】 実装基板(第3の基板)を備えた可変形状ミラーにおいて、接合部の変形を抑制する。【解決手段】 実装基板(第3の基板)300を、射影面積が相対的に大きいミラー基板(第2の基板)200に対向して配置し、ミラー基板200と実装基板300とを、アクチュエータ基板100とミラー基板200が反射部材202の面内方向と平行な面内方向(XY方向)において重ならない領域で接合する。【選択図】 図3
