PROBLEM TO BE SOLVED: To provide a thin micropump.SOLUTION: A micropump 1 comprises: an elastic tube 50 with its part forming an arc shape a cam 20 with its rotational axis generally corresponding to the center of the arc-shaped part of the tube 50 a plurality of fingers 40 to 46 disposed between the arc-shaped part of the tube 50 and the cam 20, and radially disposed from the rotational axis a rotor 70 for transmitting turning force to the cam 20 and a vibration body 80 having piezoelectric elements 82 and 83, and a projection 81a connected to the rotor 70 at its longitudinal end. Applying an AC voltage to the piezoelectric elements 82 and 83 causes the vibration body 80 to vibrate, which allows the projection 81a to repeatedly transmit turning force to the rotor 70. As a result, the cam 20 pushes the plurality of fingers 40 to 46 one by one from an inflow side of a liquid body to an outflow side. By the fingers 40 to 46, the tube 50 is repeatedly pressed to close and released to open, which transfers the liquid body.COPYRIGHT: (C)2014,JPO&INPIT【課題】薄型のマイクロポンプを提供する。【解決手段】マイクロポンプ1は、一部が円弧形状に配設され弾性を有するチューブ50と、チューブ50の円弧形状の中心と回転軸が略一致するカム20と、チューブ50の円弧形状部分とカム20の間に介設されると共に、前記回転軸から放射状に配設される複数のフィンガー40~46と、カム20に回転力を伝達するロータ70と、圧電素子82,83を有し、長手方向端部にロータ70に当接する突起部81aを有する振動体80と、が備えられ、圧電素子82,83に交流電圧を印加することにより振動体80が振動し、突起部81aからロータ70に回転力を繰り返し加え、カム20が複数のフィンガー40~46を流体の流入側から流出側へ順次押圧して、チューブ50の圧閉と開放を繰り返して流体を輸送する。【選択図】図3
