PROBLEM TO BE SOLVED: To provide a probe capable of suppressing incidence of light on a reception surface, by minimizing degradation in the mechanical characteristics of a vibrating membrane.SOLUTION: The probe has an element 8 including at least one cell structure 7 where a vibrating membrane 4, including one of two electrodes 2 and 6 provided at an interval 5, is supported vibratably. In the probe, a stress relaxation layer 10 combining moisture resistance, gas barrier properties and stress relaxation properties is formed on the vibrating membrane 4, and a light reflection layer 11 is formed on the stress relaxation layer 10. Consequently, inflow of gas or moisture to the interface of the vibrating membrane and stress relaxation layer, and to the interface of the light reflection layer and the stress relaxation layer can be suppressed, and the effect of hardness or stress of the light reflection layer can be prevented from spreading to the characteristics of the vibrating membrane.COPYRIGHT: (C)2014,JPO&INPIT【課題】振動膜の機械特性の劣化を抑制して、受信面に光が入射することを抑制できる探触子などを提供する。【解決手段】探触子は、間隙5を挟んで設けられた2つの電極2、6のうちの一方を含む振動膜4が振動可能に支持されたセル構造7を少なくとも1つ含む素子8を有する。探触子では、振動膜4上に、耐湿性とガスバリア性と応力緩和性を併せ持つ応力緩和層10が形成され、応力緩和層10上に光反射層11が形成されている。こうして、振動膜と応力緩和層との界面及び光反射層と応力緩和層との界面への気体や水分の流入を抑制でき、光反射層の硬さや応力による影響の振動膜の特性への波及を抑えられる。【選択図】図1
