RESEAUX DE TRANSDUCTEURS ULTRASONIQUES CAPACITIFS MICRO-USINES 2D A ELECTRODES SUPERIEURES ORTHOGONALES ET INFERIEURES POUR IMAGERIE 3D A COMPTAGE DE CANAUX BAS

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专利权人:

THE GOVERNORS OF THE UNIVERSITY OF ALBERTA

发明人:

ZEMP, ROGER

申请号：

CA2795441

公开号：

CA2795441A1

申请日:

2012.10.19

申请国别(地区):

CA

年份:

2014

代理人:

摘要：

Capacitive micromachined ultrasound transducers (CMUTs) offer many potentialadvantagesover piezoelectric transducers, and hold promise for cost-effective 2D arrays.Fully-wired 2Darrays are cost-prohibitive due to large channel counts. We present what wecall Top-Orthogonal-to-BottomElectrode (TOBE) 2D CMUT arrays with the potential to perform 3Dimaging with an NxN 2D array using only N transmit channels and N receivechannels.Candidate fabrication technologies are discussed and a modified sacrificialrelease process isused to fabricate a prototype. Performance of two imaging schemes isdiscussed.

来源网站：

中国工程科技知识中心

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http://www.ckcest.cn/home/