The invention provides a manufacturing method for piezoelectric sensor, comprising (a) providing a substrate, the substrate having a base board, a sacrificial layer formed on one surface of the base board, and a bottom electrode layer formed on the surface of the sacrificial layer (b) forming multiple nano-pillars, which are composed of piezoelectric materials and have piezoelectric property, on the surface of the bottom electrode layer (c) forming a layer of polymer buffer layer at gap of the nano-pillars and (d) removing the sacrificial layer so that the bottom electrode layer separating from the base board for finishing production of the piezoelectric sensor in addition, the invention also provides a piezoelectric sensor made by the manufacturing method.
