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METHOD OF MAKING SUB-SURFACE PHOTOALTERATIONS IN A MATERIAL
专利权人:
发明人:
申请号:
EP08851967.3
公开号:
EP2227199B1
申请日:
2008.11.19
申请国别(地区):
EP
年份:
2014
代理人:
摘要:
A method of photoaltering a material using a pulsed laser beam includes selecting a first pulse energy and a first focal point separation based on a relationship of pulse energy and focal point separation combinations enabling layer separation of the material by photoalteration, and scanning the pulsed laser beam along a scan region at the first pulse energy and the first focal point separation. The relationship has a slope and has a distinct change in the slope. The distinct change in the slope is associated with a second pulse energy of the relationships and the first pulse energy is equal to or less than the second pulse energy.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/
相关发明人
kuwahata, ryoji
桑畑亮嗣
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