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Optomechanical device for actuating and/or detecting movement of a mechanical element, in particular for gravimetric detection
专利权人:
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
发明人:
Hentz Sébastien,Duraffourg Laurent,Jourdan Guillaume
申请号:
US201414519390
公开号:
US10132957(B2)
申请日:
2014.10.21
申请国别(地区):
美国
年份:
2018
代理人:
Pearne & Gordon LLP
摘要:
Optomechanical device for actuating and/or detecting movement of a mechanical element, in particular for gravimetric detection. It includes a support with a mechanical element anchored to the support which is designed to move relative to the element, and a device for actuating and/or detecting movement or of variations in frequency of movement of the element. A portion of the device is arranged beneath at least part of the element, between the element and the support. The device includes a fixed optical device with at least one optical waveguide arranged beneath all or part of the element at a determined distance from the element, and which is designed to propagate at least one optical wave having a given wavelength designed to interact with the element. The optical waveguide is at a determined distance from the mechanical element so that the evanescent field of the optical waveguide interacts with the mechanical element.
来源网站:
中国工程科技知识中心
来源网址:
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