Gregor Morfill,Yangfang Li,Tetsuji Shimizu,Bernd Steffes
申请号：
US15750372
公开号：
US20180228933A1
申请日:
2016.07.25
申请国别(地区):
US
年份:
2018
代理人:
摘要：
The invention relates to an apparatus (1) for producing a plasma, having at least one first electrode (3), at least one second electrode (5), which is arranged at a distance from the first electrode (3), a voltage source (7), which is connected to at least one electrode (3,59) selected from the first electrode (3) and the second electrode (5) such that a potential difference between the at least one first electrode (3) and the at least one second electrode (5) can be produced by the voltage source (7), wherein the at least one first electrode (3) and the at least one second electrode (5) define at least one discharge path (9) for an electrical discharge in a discharge region (11) between the at least one first electrode (3) and the at least one second electrode (5). In this case, a magnetic field arrangement (15) is provided that is set up and arranged relative to the at least one first electrode (3) and the at least one second electrode (5), to provide a magnetic field in the discharge region (11), so that a magnetic field vector (B) of the magnetic field is oriented at an angle to the discharge path (9).
