An ophthalmic surgical laser system includes a laser engine, to generate a laser beam, a first Z scanner, to receive the generated laser beam, and to scan a focal spot of the laser system over a first Z interval along an optical axis of the laser system an XY scanner, to receive the laser beam output by the first Z scanner, and to scan the focal spot of the laser system in a direction essentially transverse to the optical axis of the laser system, and a second Z scanner, to receive the scanned laser beam from the XY scanner, and to scan the focal spot of the laser system over a second Z interval along the optical axis of the laser system.
