BROCKMANN, Christian,FREITAG, Thomas,KNOPF, Christoph
申请号:
EP16828702.7
公开号:
EP3386409A1
申请日:
2016.12.08
申请国别(地区):
EP
年份:
2018
代理人:
摘要:
According to actual bipolar electrode, electrode tip (1) includes two working surfaces (12,13). These working surfaces can be manufactured with photolithographicallpatterned more complicated profile is presented. Working surface (12,13) are depicted, when being projected in plane, working surface (12,13) is configured to fan-shaped, arranged concentric region in a ring. In addition, another region disk-shaped in plane projection is centrally located. Plasma is alternately lighted a fire at two poles (12,13). If each concentric region is oriented close enough relative to each other, continuous plasmasphere will be generated.