A system for decontaminating a device, such as a medical device, includes a decontamination chamber configured to retain the device and a chemical dispersion assembly configured to deliver a decontaminating fluid to the decontamination chamber. A pressure control assembly is connected to the decontamination chamber and configured to control the pressure in the decontamination chamber. The system also includes a system controller configured to control the decontamination chamber, chemical dispersion assembly, and pressure control assembly. A decontaminating fluid is added into the decontamination chamber at a first rate while increasing the pressure in the decontamination chamber. Adding the decontaminating fluid increases a relative humidity in the decontamination chamber.
