Methods of forming a microfluidic device include: combining a volume of uncured liquid silicone based polymer with a volume of adhesive polymer to provide a flowable material applying the flowable material to a mold and curing the flowable material on the mold to form a microfluidic device layer comprising an exposed face with at least one channel or chamber and contacting the exposed face of the microfluidic device layer to a substrate to adhere the microfluidic device layer to the substrate to enclose the at least one channel or chamber to form a microfluidic device. Other methods include combining a volume of uncured liquid silicone based polymer with a volume of adhesive polymer to provide an intermediary material applying a layer of the intermediary material to a substrate and curing the layer of the intermediary material on the substrate obtaining a silicon based polymer that comprises an exposed face that comprises at least one channel or chamber and contacting the exposed face of the silicon based polymer to the cured layer of the intermediary material, wherein the exposed face of the silicon based polymer adheres to the cured layer of the intermediary material to enclose the at least one channel or chamber to form a microfluidic device. Also disclosed are microfluidic devices and sensors comprising the microfluidic devices.
