James A. Bickford,Stephanie Lynne Golmon,Paul A. Ward,William D. Sawyer,Marc S. Weinberg,John J. LeBlanc,Louis Kratchman,James S. Pringle, JR.,Daniel Freeman,Amy Duwel,Max Lindsay Turnquist,Ronald Ste
申请号：
US15944106
公开号：
US20180284175A1
申请日:
2018.04.03
申请国别(地区):
US
年份:
2018
代理人:
摘要：
Aspects are generally directed to a compact and low-noise electric field detector, methods of operation, and methods of production thereof. In one example, an electric field detector includes a proof mass, a source of concentrated charge coupled to the proof mass, and a substrate having a substrate offset space defined therein, the proof mass being suspended above the substrate offset space. The electric field detector further includes a sense electrode disposed on the substrate within the substrate offset space and proximate the proof mass, the sense electrode being configured to measure a change in capacitance relative to the proof mass from movement of the proof mass in response to a received electric field at the source of concentrated charge. The electric field detector includes a control circuit coupled to the sense electrode and configured to determine a characteristic of the electric field based on the measured change in capacitance.
