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VCSEL based low coherence emitter for confocal 3D scanner
专利权人:
Inc.;Align Technology
发明人:
Yossef Atiya,Tal Verker
申请号:
US15490531
公开号:
US10148066B2
申请日:
2017.04.18
申请国别(地区):
US
年份:
2018
代理人:
摘要:
Methods and apparatus for measuring objects comprise a plurality of light sources to generate a plurality of light beams directed toward a spot generator array comprising a plurality of spot generating lenses. The plurality of light sources is separated from the spot generator array with a separation distance sufficient to overlap the plurality of light beams at each of the spot generating lenses. The overlap of each of the beams at each of the spot generating lenses provides smoothing of the energy profile of the light energy incident on the spot generating lenses. The spot generator array generates focused spots comprising overlapping focused beams. The overlapping beams may comprise overlapping beams of a vertical cavity surface emitting laser (VCSEL) array, and the overlapping focused beams can decrease optical artifacts.
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