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IMAGE ACQUISITION APPARATUS
专利权人:
Futoshi Hirose
发明人:
Futoshi Hirose
申请号:
US13574873
公开号:
US20120293770A1
申请日:
2011.01.19
申请国别(地区):
US
年份:
2012
代理人:
摘要:
An image acquisition apparatus irradiates light from a light source to an inspection object, obtains a tomographic image of the inspection object on the basis of a combined beam obtained by combining a return beam from the inspection object due to the irradiated light and a reference beam corresponding to the light, and obtains a plane image of the inspection object on the basis of the return beam from the inspection object due to the irradiated light. The apparatus performs a first scanning process to main-scan the irradiated light when the tomographic image is obtained, performs a second scanning process to main-scan the irradiated light at a speed higher than that in the first scanning process when the plane image is obtained, and performs a third scanning process to sub-scan the irradiated light when each of the tomographic image and the plane image is obtained.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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