PROBLEM TO BE SOLVED: To provide a production method for carbon nanotube generation substrate that can suppress the decrease in generation rate of carbon nanotube even for cases of re-use.SOLUTION: A production method for carbon nanotube generation substrate comprising a substrate 1 and a catalyst layer 4 disposed on the substrate 1, in which it is characterized in that the step to form a catalyst layer 4 on a substrate 1 comprises: a catalyst membrane forming work of forming a catalyst membrane 5 on substrate 1; a barrier membrane forming work of forming a barrier membrane 6 not contributing to the growth of carbon nanotubes; and an atomization work of atomizing catalyst membrane 5 and barrier membrane 6, and that the atomization work forms multiples of respective catalyst particle 2 and barrier particle 3 as well as that disposing barrier particles 3 between a plurality of catalyst particles 2.
