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コンフォーマルマスク材料のレーザ加工方法
专利权人:
パナソニックIPマネジメント株式会社
发明人:
櫻井 通雄,佐々木 義典
申请号:
JP20140181941
公开号:
JP6134914(B2)
申请日:
2014.09.08
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide a laser processing method of a conformal mask material which performs laser processing of non-through-hole processing of the conformal mask material efficiently in high quality, while also securing versatility of a laser processing machine capable of fine processing.SOLUTION: A laser processing method of conformal mask material includes: a first process in which a sheet-shaped material to be processed provided with an insulation layer and a metal layer and subjected to conformal mask processing on the metal layer is installed, a closed region including a hole part where a part of the metal layer is removed by the conformal mask processing is set, and a laser pulse is applied in a straight line shape with a prescribed cycle from one side edge of the closed region to the other side edge along a first direction; and a second process in which a start position of the first process is moved to a position separated by a predetermined distance in a second direction. Therein, the first
来源网站:
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