PROBLEM TO BE SOLVED: To provide a cleaning apparatus capable of preventing the cleaning water for a cleaning process of a cleaning program from flying off by the forth of the exhaust from an air exhaust port even when the temperature of the cleaning water suddenly rises above the temperature of the cleaning water for the preceding cleaning process.SOLUTION: A cleaning apparatus 10 is provided with a control device 50 which includes a cleaning program for executing a plurality of times a cleaning process which causes a cleaning pump 27 to jet cleaning water supplied by cleaning water supply means 28, 29, 40 out of cleaning nozzles 24, 25 to an object to be cleaned for cleaning the object. In the cleaning apparatus, the control device 50 includes a cleaning pump control part 51 for controlling the number of revolutions of the cleaning pump 27, the cleaning pump control part 51 exerting control to reduce the number of revolutions of the cleaning pump 27 for a predetermined period of time during execution of the cleaning process when the temperature of the cleaning water for the cleaning process is set higher than that for the preceding cleaning process.COPYRIGHT: (C)2014,JPO&INPIT【課題】洗浄プログラムの洗浄工程の洗浄水の温度が直前の洗浄工程の洗浄水の温度より急激に高くなるときでも、排気口から排気の勢いにより洗浄水が飛び散らないようにする洗浄装置を提供する【解決手段】洗浄水供給手段28,29,40から供給される洗浄水を洗浄ポンプ27により洗浄ノズル24,25から被洗浄物に噴射して洗浄する洗浄工程を複数回実行する洗浄プログラムを有した制御装置50を備えた洗浄装置10において、制御装置50は洗浄ポンプ27の回転数を制御する洗浄ポンプ制御部51を備え、洗浄工程の洗浄水の設定温度が直前の洗浄工程の設定温度より高く設定されているときに、洗浄工程を実行するときに洗浄ポンプ制御部51により洗浄ポンプ27の回転数を所定時間下げるように制御した。【選択図】図6
