Tsu-Wang Shen,Tsung-Yu Ho,Weng-Kong Tam,Yu-Nong Wang
申请号:
US14255111
公开号:
US09445718B2
申请日:
2014.04.17
申请国别(地区):
US
年份:
2016
代理人:
摘要:
An optical system for measuring an observed object includes an illuminant component, an imaging component, and an optical component. The illuminant component generates a measuring light. The optical component including a mirror and a beam splitter is located between the illuminant component and the imaging component. The mirror is located between the illuminant component and the observed object, the beam splitter is located between the mirror, the observed object, and the imaging component. The measuring light is projected to the observed object via the mirror and beam splitter, and an imaging light that has been generated from the illuminant component and reflected by the observed object is projected to the imaging component via the beam splitter, the imaging light and the measuring light intersect at the beam splitter. The present invention also provides a measurement method.