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Flexible 3D microprobe structure
专利权人:
Da-Jeng Yao
发明人:
Da-Jeng Yao,Chang-Hsiao Chen,Shih-Chang Chuang,Yen-Chung Chang
申请号:
US12637485
公开号:
US08280479B2
申请日:
2009.12.14
申请国别(地区):
US
年份:
2012
代理人:
摘要:
The present invention discloses a flexible 3D microprobe structure, which comprises at least one probe, a base and a hinge portion. The probe is connected to the base via the hinge portion. The probe forms a bend angle with respect to a normal of the base by attracting the probe through an electrostatic force to make the hinge portion bend with respect to the base, and thus to form a 3D structure having the bend angle. The probe, the base and the hinge portion are made of a flexible polymeric material to reduce the inflammation response of creatures. Further, a fixing element is used to enhance the structural strength of the flexible 3D microprobe structure.
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