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Optical image measuring device and control method thereof
专利权人:
Takefumi Hayashi
发明人:
Takefumi Hayashi
申请号:
US13142938
公开号:
US08646913B2
申请日:
2009.12.07
申请国别(地区):
US
年份:
2014
代理人:
摘要:
A low-coherence light is split into a signal light and a reference light. The optical path length of the reference light is switched to optical path lengths that correspond to a first depth zone and a second depth zone. When forming a tomographic image of the second depth zone, in an optical system that condenses the signal light to the first depth zone when a measured object and an objective lens are located at a predetermined working distance, while being positioned at the working distance, a depth zone switching lens that transitions the depth at which the signal light is condensed to the second depth zone is inserted.
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