NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
发明人:
WANG Qinghua,RI Shien,TSUDA Hiroshi
申请号:
WO2017JP20435
公开号:
WO2018061321(A1)
申请日:
2017.06.01
申请国别(地区):
世界知识产权组织国际局
年份:
2018
代理人:
摘要:
In a conventional moire method, achieving both measurement accuracy and dynamic measurement and balancing field of view and measurement accuracy have been difficult. The present invention makes it possible to handle conventional moire fringes as a grating for generating phase-shifted second-order moire fringes, use a spatial phase shift method algorithm to accurately analyze the phases of the second-order moire fringes before and after deformation, and determine shape from the phase differences between gratings projected onto the surface of an object of measurement and a reference surface and determine deformation and strain from the phase differences between the second-order moire fringes, before and after deformation, of a repeating pattern on the object surface or a produced grating. As a result, it is possible to measure the three-dimensional shape and deformation distribution of an object accurately and with a wide field of view or dynamically and with a high degree of accuracy.