Provided is an inspection apparatus, including: a measurement optics system configured to scan an object to be inspected with measuring light from a light source； a dividing unit, which is arranged at a position conjugate with the object to be inspected, and is configured to divide return light, being the measuring light returning from the object to be inspected, into a plurality of light beams； a photo-receiving unit configured to receive the plurality of light beams obtained by the division； a recording unit configured to record image data of the object to be inspected, which is based on a plurality of intensity signals output by the photo-receiving unit, and a division direction in which the return light is divided, the image date being associated with the division direction； and an analysis unit configured to analyze the image data based on the associated division direction.
